High precision roundness measurement with two chromatic confocal sensors

Yingzuo Wang; Jiao Bai; Guangyao Huang; Qian Zhou; Xiaohao Wang; Xinghui Li

doi:10.1117/12.2602211

9 October 2021 High precision roundness measurement with two chromatic confocal sensors

Yingzuo Wang, Jiao Bai, Guangyao Huang, Qian Zhou, Xiaohao Wang, Xinghui Li

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 1189915 (2021) https://doi.org/10.1117/12.2602211
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

As a fundamental geometric indicator, high precision roundness measurement is the basis evaluation index of cylindrical or spherical parts. In most roundness measurements, the rotation platforms are used to bring certain rotation error to the measurement result. Two-probe method is a typical roundness measurement strategy with error separation technique, coming from three-probe method with low cost, online integration, flexible installation, etc. We developed a roundness measurement system with three chromatic confocal displacement sensors with flexibility and high axial-resolution. As the measurement start, two sets of displacement data are achieved to take part in the frequency calculation. A typical cylindrical workpiece was measured for its roundness, which was very close with the measurement result by an ultra-precision roundness meter. In a word, the chromatic confocal roundness measurement system is feasible to provide high precision roundness with two-probe method.

Citation Download Citation

Yingzuo Wang, Jiao Bai, Guangyao Huang, Qian Zhou, Xiaohao Wang, and Xinghui Li "High precision roundness measurement with two chromatic confocal sensors", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 1189915 (9 October 2021); https://doi.org/10.1117/12.2602211

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