Overview of CMOS Sensors for Future Tracking Detectors
Abstract
:1. Introduction
2. Large Versus Small Fill-Factor Structures
3. Challenges of the Depleted CMOS Sensors
3.1. Radiation Tolerance
3.2. Timing Resolution
3.3. Fast Readout
4. Commercial CMOS Foundries
5. Summary of CMOS Activities in the Framework of the CERN RD50 Collaboration
5.1. RD50-MPW1
5.2. RD50-MPW2
5.3. RD50-MPW3 and RD50-ENGRUN1
6. Conclusions
Funding
Acknowledgments
Conflicts of Interest
Abbreviations
CMOS | Complementary Metal-Oxide-Semiconductor |
ATLAS | A Toroidal LHC ApparatuS |
CMS | Compact Muon Solenoid |
HL-LHC | High Luminosity Large Hadron Collider |
DMAPS | Depleted Monolithic Active Pixel Sensors |
CERN | Conseil Européen pour la Recherche Nucléaire |
MPW | Multi-Project Wafer |
References
- ATLAS Collaboration. Technical Design Report for the ATLAS Inner Tracker Pixel Detector; CERN-LHCC-2017-021; CERN: Meyrin, Switzerland, 2017. [Google Scholar]
- CMS Collaboration. The Phase-2 Upgrade of the CMS Tracker (Technical Design Report); CERN-LHCC-2017-009; CERN: Meyrin, Switzerland, 2017. [Google Scholar]
- Wermes, N. CMOS pixel sensors/detectors overwiew. In Proceedings of the 32nd RD50 Workshop, Hamburg, Germany, 4–6 June 2018. [Google Scholar]
- Hemperek, T. Overview and perspectives of depleted CMOS sensors for high radiation environments. Proc. Sci. 2017. Available online: https://pos.sissa.it/309/034/pdf (accessed on 27 November 2020).
- Snoeys, W.; Rinella, G.A.; Hillemanns, H.; Kugathasan, T.; Mager, M.; Musa, L.; Riedler, P.; Reidt, F.; Van Hoorne, J.; Fenigstein, A.; et al. A process modification for CMOS monolithic active pixel sensors for enhanced depletion, timing performance and radiation tolerance. Nucl. Inst. Methods Phys. Res. A 2017, 871, 90–96. [Google Scholar] [CrossRef]
- Vilella, E. Radiation tolerance and time resolution of depleted CMOS sensors. In Proceedings of the 27th International Workshop on Vertex Detectors, Chennai, India, 22–26 October 2018. [Google Scholar]
- Besana, M.I.; Cerutti, F.; Ferrari, A.; Riegler, W.; Vlachoudis, V. Evaluation of the radiation field in the future circular collider detector. Phys. Rev. Accel. Beams 2016, 19, 111004. [Google Scholar] [CrossRef]
- Mandić, I.; Cindro, V.; Gorišek, A.; Hiti, B.; Kramberger, G.; Mikuž, M.; Zavrtanik, M.; Hemperek, T.; Daas, M.; Hügging, F.; et al. Neutron irradiation test of depleted CMOS pixel detector prototypes. JINST 2017, 12, P02021. [Google Scholar] [CrossRef] [Green Version]
- Augustin, H.; Berger, N.; Blattgerste, C.; Dittmeier, S.; Ehrler, F.; Grzesik, C.; Hammerich, J.; Herkert, A.; Huth, L.; Immig, D.; et al. Performance of MuPix8 a large scale HV-CMOS pixel sensor. In Proceedings of the International Workshop on Semiconductor Pixel Detectors for Particles and Imaging (PIXEL 2018), Taipei, Taiwan, 10–14 December 2018. [Google Scholar]
- Benoit, M. Characterization of the 180nm HV-CMOS ATLASPix large-fill factor Monolithic prototype. In Proceedings of the 14th Trento Workshop on Advanced Silicon Radiation Detectors, Trento, Italy, 25–27 February 2019. [Google Scholar]
- Wang, T.; Barbero, M.; Berdalovic, I.; Bespin, C.; Bhat, S.; Breugnon, P.; Caicedo, I.; Cardella, R.; Chen, Z.; Degerli, Y.; et al. Depleted fully monolithic CMOS pixel detectors using a column based readout architecture for the ATLAS Inner Tracker upgrade. JINST 2018, 13, C03039. [Google Scholar] [CrossRef] [Green Version]
- Kiehn, M.; Di Bello, F.A.; Benoit, M.; Mohr, R.C.; Chen, H.; Chen, K.; Sultan, D.M.S.; Ehrler, F.; Ferrere, D.; Frizell, D.; et al. Performance of CMOS pixel sensor prototypes in ams H35 and aH18 technology for the ATLAS ITk upgrade. Nucl. Inst. Methods Phys. Res. 2019, 924, 104–107. [Google Scholar] [CrossRef] [Green Version]
- HHiti, B.; Simon Argemi, L.; Asensi Tortajada, I.; Berdalovi´c, I.; Caicedo Sierra, I.; Cardella, R.; Dachs, F.; Dao, V.; Egidos Plaja, N.; Gorišek, A.; et al. Development of the monolithic “MALTA” CMOS sensor for the ATLAS ITk outer pixel layer. Proc. Sci. 2019, 343, 155. [Google Scholar]
- LFoundry. Available online: http://www.lfoundry.com/ (accessed on 26 November 2020).
- Sensor Solutions. Available online: https://ams.com (accessed on 26 November 2020).
- TSI Semiconductors. Available online: https://www.tsisemi.com/ (accessed on 26 November 2020).
- Vilella, E.; Benoit, M.; Casanova, R.; Casse, G.; Ferrere, D.; Iacobucci, G.; Peric, I.; Vossebeld, J. Prototyping of an HV-CMOS demonstrator for the High Luminosity-LHC upgrade. JINST 2016, 11, C01012. [Google Scholar] [CrossRef]
- Tower Semiconductor. Available online: https://towersemi.com/ (accessed on 26 November 2020).
- X-FAB. Available online: https://www.xfab.com (accessed on 26 November 2020).
- Hemperek, T.; Kishishita, T.; Krüger, H.; Wermes, N. A Monolithic Active Pixel Sensor for ionizing radiation using 180 nm HV-SOI process. Nucl. Inst. Methods Phys. Res. 2015, 796, 8–12. [Google Scholar] [CrossRef] [Green Version]
- RD50 - Radiation Hard Semiconductor Devices for Very High Luminosity Colliders. Available online: https://rd50.web.cern.ch/ (accessed on 26 November 2020).
- Mandić, I.; Cindro, V.; Gorišek, A.; Hiti, B.; Kramberger, G.; Zavrtanik, M.; Mikuž, M.; Hemperek, T. Charge-collection properties of irradiated depleted CMOS pixel test structures. Nucl. Inst. Methods Phys. Res. 2018, 903, 126–133. [Google Scholar] [CrossRef]
- Cavallaro, E.; Casanova, R.; Förster, F.; Grinstein, S.; Lange, J.; Kramberger, G.; Mandić, I.; Puigdengoles, C.; Terzo, S. Studies of irradiated AMS H35 CMOS detectorsfor the ATLAS tracker upgrade. JINST 2017, 12, C01074. [Google Scholar] [CrossRef] [Green Version]
- Vilella, E.; Alonso, O.; Bergauer, T.; Casanova, R.; Casse, G.; Dieguez, A.; Franks, M.; Grinstein, S.; Irmler, C.; Marco-Hernandez, R.; et al. Overview of design and evaluation of depleted CMOS sensors within RD50. In In Proceedings of the 33rd RD50 Workshop, Geneva, Switzerland, 26–28 November 2018. [Google Scholar]
- Peri´c, I.; Blanquart, L.; Comes, G.; Denes, P.; Einsweiler, K.; Fischer, P.M.; Elli, E.; Meddeler, G. The FEI3 readout chip for the ATLAS pixel detector. Nucl. Inst. Methods Phys. Res. 2006, 565, 178–187. [Google Scholar] [CrossRef]
- Marco-Hernandez, R. Development of a modular DAQ to characterize the RD50 depleted monolithic active pixel sensors. In Proceedings of the 34th RD50 Workshop, Lancaster, UK, 12–14 June 2019. [Google Scholar]
- Mandic, I. Irradiation study of CMOS pixel detector structures on RD50-MPW1 chips from LFoundry. In Proceedings of the 33rd RD50 Workshop, CERN, Geneva, Switzerland, 26–28 November 2018. [Google Scholar]
- Forster, F. LF2/RD50-MPW1 characterization. In Proceedings of the 34th RD50 Workshop, Lancaster, UK, 12–14 June 2019. [Google Scholar]
- Powell, S.; Vilella, E.; Alonso, O.; Barbero, M.; Casanova, R.; Casse, G.; Dieguez, A.; Franks, M.; Grinstein, S.; Hinojo, J.M.; et al. A status update on the CMOS work package within the CERN-RD50 collaboration. In Proceedings of the 35th RD50 Workshop, Geneva, Switzerland, 18–20 November 2019. [Google Scholar]
- Vilella, E.; Alonso, O.; Barbero, M.; Casanova, R.; Casse, G.; Dieguez, A.; Franks, M.; Grinstein, S.; Hinojo, J.M.; Lopez, E.; et al. Design work of depleted CMOS sensors within the CERN-RD50 collaboration. In Proceedings of the 34th RD50 Workshop, Lancaster, UK, 12–14 June 2019. [Google Scholar]
- Franks, M. Design optimisation of depleted CMOS detectors using TCAD simulations within the CERN-RD50 collaboration. In Proceedings of the 14th Trento Workshop on Advanced Radiation Silicon Detectors, Trento, Italy, 25–27 February 2019. [Google Scholar]
- Zhang, C.; Cassea, G.; Massarib, N.; Vilellaa, E.; Vossebelda, J. Development of RD50-MPW2: A high-speed monolithic HV-CMOS prototype chip within the CERN-RD50 collaboration. In Proceedings of the Topical Workshop on Electronics for Particle Physics, Santiago de Compostela, Spain, 2–6 September 2019. [Google Scholar]
- Vilella Figueras, E.; RD50 Collaboration. Recent depleted CMOS developments within the CERN-RD50 framework. In Proceedings of the 28th International Workshop on Vertex Detectors, Lopud, Croatia, 13–18 October 2019. [Google Scholar]
- Irmler, C. Data Acquisition System for Characterization of RD50 HV-CMOS Active Pixel Matrix Prototypes. In Proceedings of the 36th RD50 Workshop, Geneva, Switzerland, 3–5 June 2020. [Google Scholar]
- Franks, M. Initial I-V and e-TCT measurements of a depleted CMOS sensor within the CERN-RD50 collaboration. In Proceedings of the 36th RD50 Workshop, Geneva, Switzerland, 3–5 June 2020. [Google Scholar]
- Marco-Hernández, R. First tests and characterization of the RD50-MPW2 active pixel matrix, bandgap voltage reference and SEU tolerant memory. In Proceedings of the 36th RD50 Workshop, Geneva, Switzerland, 3–5 June 2020. [Google Scholar]
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Marco-Hernández, R. Overview of CMOS Sensors for Future Tracking Detectors. Instruments 2020, 4, 36. https://0-doi-org.brum.beds.ac.uk/10.3390/instruments4040036
Marco-Hernández R. Overview of CMOS Sensors for Future Tracking Detectors. Instruments. 2020; 4(4):36. https://0-doi-org.brum.beds.ac.uk/10.3390/instruments4040036
Chicago/Turabian StyleMarco-Hernández, Ricardo. 2020. "Overview of CMOS Sensors for Future Tracking Detectors" Instruments 4, no. 4: 36. https://0-doi-org.brum.beds.ac.uk/10.3390/instruments4040036