Giant Burgers Vector Micropipe-Dislocations in Silicon Carbide Investigated by Atomic Force Microscopy

Etienne Pernot; J. Härtwig; Michel Pons; Roland Madar

doi:10.4028/www.scientific.net/MSF.527-529.435

Paper Titles

Why Are Only Some Basal Plane Dislocations Converted to Threading Edge Dislocations During SiC Epitaxy?
p.419

3-Dimensional Non-Destructive Dislocation Analyses in SiC Measured by Planar Electron-Beam-Induced Current Method
p.423

Effect of Crystal Defects on Reverse I-V Characteristics of 4H-SiC APDs
p.427

Structural Defects and Critical Electric Field in 3C-SiC
p.431

Giant Burgers Vector Micropipe-Dislocations in Silicon Carbide Investigated by Atomic Force Microscopy
p.435

Open Core Dislocations and Surface Energy of SiC
p.439

Comparison between Measurement Techniques Used for Determination of the Micropipe Density in SiC Substrates
p.443

A New Method of Mapping and Counting Micropipes in SiC Wafers
p.447

Identification of Polytypes in Sublimation Grown 4H-SiC Crystals by High Resolution X-Ray Diffractometry
p.451

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Giant Burgers Vector Micropipe-Dislocations in Silicon Carbide Investigated by Atomic Force Microscopy

Abstract:

Recently, in some silicon carbide single crystals, some micropipes associated with screw dislocation have been observed by X-ray topography and the strain field around them produced images similar to those of screw dislocations with a very large Burgers vector, about 667 nm. The radius of the hole in the centre of the micropipe is less than 10 'm. This value and the theoretical predictions by Frank (about 7.8 mm) using the Burgers vector magnitude show a large discrepancy. In this paper we present Atomic Force Microscopy experiments around this kind of defects. The Burgers vector magnitude of the screw dislocation and the value of the radius have been measured by this technique. Not only one dislocation, but several have been observed around the micropipe. We concluded that it is in better agreement with the Frank theory modified by Cabrera and Levine concerning kinetic effects during the growth.