Towards Integrated Plasmonic Gas Sensors in the MWIR †
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication of the Structures
2.2. Plasmonic Characterization
3. Results and Discussion
4. Conclusions
Funding
Institutional Review Board Statement
Conflicts of Interest
References
- Jannesari, R.; Abasahl, B.; Grille, T.; Jakoby, B. Hybrid Photonic Crystal-Surface Plasmon Polariton Waveguiding System for On-Chip Sensing Applications. Proceedings 2018, 2, 864. [Google Scholar] [CrossRef] [Green Version]
- Jannesari, R.; Grille, T.; Consani, C.; Stocker, G.; Tortschanoff, A.; Jakoby, B. Design of a Curved Shape Photonic Crystal Taper for Highly Efficient Mode Coupling. Sensors 2021, 21, 585. [Google Scholar] [CrossRef] [PubMed]
- Zhang, J.X.J.; Hoshino, K. Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering; Academic Press: Cambridge, MA, USA, 2018. [Google Scholar]
- Stocker, G.; Spettel, J.; Grille, T.; Ostermann, T.; Jannesari, R.; Jakoby, B. Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications. In Proceedings of the 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Milpitas, CA, USA, 10–12 May 2021; pp. 1–4. [Google Scholar]
- Spettel, J.; Stocker, G.; Dao, T.D.; Jannesari, R.; Tortschanoff, A.; Saeidi, P.; Pühringer, G.; Dubois, F.; Fleury, C.; Consani, C.; et al. Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratings. Opt. Mater. Express 2021, 11, 1058–1069. [Google Scholar] [CrossRef]
- Stocker, G.; Spettel, J.; Dao, T.D.; Tortschanoff, A.; Jannesari, R.; Pühringer, G.; Saeidi, P.; Dubois, F.; Fleury, C.; Consani, C.; et al. Plasmonic silver grating for mid-infrared sensing. In Proceedings of the 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Virtual Conference, Orlando, FL, USA, 20–25 June 2021; pp. 1072–1075. [Google Scholar]
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Tortschanoff, A.; Spettel, J.; Stocker, G.; Dao, T.D.; Consani, C.; Fleury, C.; Dubois, F.; Grille, T.; Ostermann, T.; Saeidi, P.; et al. Towards Integrated Plasmonic Gas Sensors in the MWIR. Eng. Proc. 2021, 6, 90. https://0-doi-org.brum.beds.ac.uk/10.3390/I3S2021Dresden-10104
Tortschanoff A, Spettel J, Stocker G, Dao TD, Consani C, Fleury C, Dubois F, Grille T, Ostermann T, Saeidi P, et al. Towards Integrated Plasmonic Gas Sensors in the MWIR. Engineering Proceedings. 2021; 6(1):90. https://0-doi-org.brum.beds.ac.uk/10.3390/I3S2021Dresden-10104
Chicago/Turabian StyleTortschanoff, Andreas, Jasmin Spettel, Gerald Stocker, Thang Duy Dao, Cristina Consani, Clement Fleury, Florian Dubois, Thomas Grille, Thomas Ostermann, Parviz Saeidi, and et al. 2021. "Towards Integrated Plasmonic Gas Sensors in the MWIR" Engineering Proceedings 6, no. 1: 90. https://0-doi-org.brum.beds.ac.uk/10.3390/I3S2021Dresden-10104