Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes
Abstract
:1. Introduction
2. Mathematical Modeling
2.1. Structural Imperfection Consideration
2.2. Energies of Ring-Based Gyroscope
2.3. Governing Equations of Motion
3. Modal Analysis
4. Results and Discussion
4.1. Frequency Split
4.2. Modal Coupling
4.3. Geometrical Compensation
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Conflicts of Interest
Appendix A
References
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Model | Material Anisotropy | Mass Asymmetry | Non-Ideal Ring | Non-Ideal Beam | Non-Ideal Trench | Reference |
---|---|---|---|---|---|---|
FEM | Yes | Yes | Yes | Yes | No | [7] |
FEM | Yes | Yes | Yes | No | No | [8] |
Analytical | Yes | No | No | No | No | [9] |
Analytical | Yes | Yes | No | No | No | [10] |
Analytical | Yes | Yes | Yes | Yes | Yes | This work |
Parameter | Value | Description |
---|---|---|
E0 (GPa) | 150 | Average Young’s modulus of (100) SCS |
ρ (kg/m3) | 2330 | Bulk density |
Rr (mm) | 1 | Ring radius |
Wr (μm) | 11 | Ring width |
Hr (μm) | 60 | Ring thickness |
Δθ (°) | 18 | Electrode radian |
rsp (μm) | 472.5 | Beam radius |
Wsp (μm) | 5 | Beam width |
d0 (μm) | 4 | Electrode and undeformed ring gap |
Cinp (pF) | 1 | Feedback reference capacitance in CV circuit |
Vdn (V) | 2.5 | Drive voltage |
Vp (V) | 2.5 | Polarization voltage |
Vb (V) | 0 | Bias voltage at the pick-off |
Method | Frequency Split (Hz) | Description |
---|---|---|
Analytical | 844 | Equation (32) |
Analytical | 593 | Equation (31) |
FEM | 799 | COMSOL |
Experimental | 625 (σ =18 Hz) | nine as fabricated samples |
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Ma, Z.; Chen, X.; Jin, X.; Jin, Y.; Zheng, X.; Jin, Z. Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes. Micromachines 2021, 12, 1483. https://0-doi-org.brum.beds.ac.uk/10.3390/mi12121483
Ma Z, Chen X, Jin X, Jin Y, Zheng X, Jin Z. Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes. Micromachines. 2021; 12(12):1483. https://0-doi-org.brum.beds.ac.uk/10.3390/mi12121483
Chicago/Turabian StyleMa, Zhipeng, Xiaoli Chen, Xiaojun Jin, Yiming Jin, Xudong Zheng, and Zhonghe Jin. 2021. "Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes" Micromachines 12, no. 12: 1483. https://0-doi-org.brum.beds.ac.uk/10.3390/mi12121483