Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction
Abstract
:1. Introduction
2. Materials and Methods
2.1. Materials
2.2. Experimental Conditions
2.3. Theoretical Part
3. Results
3.1. Hydrogen Reduction of SiCl4
3.2. Hydrogen Reduction of GeCl4
4. Discussion
4.1. Characterization of Samples Obtained during the Reduction of SiCl4
4.2. Samples of Germanium Obtained in RF-Arc Discharge from GeCl4
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Admixture | C, ppm (mol.) | ||
---|---|---|---|
Source SiCl4 | Chlorosilanes | Si | |
Fe | 0.0100 | 0.00600 | 2.60 |
Cu | 0.0005 | 0.00050 | 0.04 |
Cr | 0.0020 | 0.00080 | 2.20 |
Mn | 0.0040 | 0.00200 | 2.20 |
Ni | 0.0002 | 0.00018 | 1.30 |
Mg | 0.0100 | 0.00700 | 1.60 |
Al | 0.0040 | 0.00400 | <7.00 |
B | --- | --- | <0.30 |
P | --- | --- | <2.00 |
As | --- | --- | <0.30 |
Sn | --- | --- | <0.03 |
C6H6 | 960 | 4 | --- |
C6H14 | 700 | 2 | --- |
Admixture | Source GeCl4 | Ge | Admixture | Source GeCl4 | Ge |
---|---|---|---|---|---|
B | 0.300 | 0.300 | Co | 0.002 | 0.003 |
Al | <1.900 | <1.900 | Fe | 0.030 | 8.100 |
P | 1.200 | 1.200 | Cu | <0.200 | <0.200 |
As | 0.500 | 0.500 | Zn | <0.100 | <0.100 |
Sb | 0.003 | 0.003 | Cr | 0.800 | 0.700 |
Sn | 0.100 | 0.100 | Mn | 0.010 | 0.010 |
W | 0.100 | 170,000 | Mo | 0.800 | 0.600 |
Ti | <0.200 | <0.200 | Mg | <0.400 | <0.400 |
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Kornev, R.; Gornushkin, I.; Shabarova, L.; Kadomtseva, A.; Mochalov, G.; Rekunov, N.; Romanov, S.; Medov, V.; Belousova, D.; Maleev, N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci 2024, 6, 1. https://0-doi-org.brum.beds.ac.uk/10.3390/sci6010001
Kornev R, Gornushkin I, Shabarova L, Kadomtseva A, Mochalov G, Rekunov N, Romanov S, Medov V, Belousova D, Maleev N. Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction. Sci. 2024; 6(1):1. https://0-doi-org.brum.beds.ac.uk/10.3390/sci6010001
Chicago/Turabian StyleKornev, Roman, Igor Gornushkin, Lubov Shabarova, Alena Kadomtseva, Georgy Mochalov, Nikita Rekunov, Sergey Romanov, Vitaly Medov, Darya Belousova, and Nikita Maleev. 2024. "Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction" Sci 6, no. 1: 1. https://0-doi-org.brum.beds.ac.uk/10.3390/sci6010001